Fabrication and synthesis
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Sputtering and E-beam Combined System |
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Pulse Laser Deposition with in-situ RHEED System (Neocera) |
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Laser Molecular Beam Epitaxy system (LMBE-450A) |
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Pulse Laser Deposition System (PLD-450) |
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Magnetron Sputtering System (JGP560CC) |
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Ion Beam Etching System (LKJ-3D-150) |
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Vacuum annealing furnace (SGL-60) |
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Chemical Vapor Deposition System |
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Cleanroom |
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Performance characterization
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Vibrating Sample Magnetometer (7407) |
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Ultraviolet Visible Spectrometer (U-3310) |
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Surface Profiler (P-7) |
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Shared equipments
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Atomic Force Microscope (AFM) |
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Superconducting Quantum Interference Device (SQUID) |
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Scanning Electron Microscope (JSM-7500F) |
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Transmission Electron Microscope (JEM-2100) |
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Physical Property Measurement System (PPMS) |
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X-ray Diffraction (Ultima IV-185) |